An accelerometer is an electromechanical device that will measure static (gravity) or dynamic (motion or vibration) acceleration forces. Major applications requiring accelerometers can be classified as seismic, vibration, inertial or tilt sensing.

There are various technologies used to manufacture miniaturized sensors (bulk micromachining, surface micromachining, piezoelectric, piezoresistive, thermal-

mechanical, plated structures, etc.), but they are not all equivalent in terms of cost-effectively and reliably addressing applications that require both high performance and robust operation.

Therefore to address these applications, Colibrys accelerometers are based on MEMS capacitive sensors integrating bulk micro-machined silicon elements.

 Seismic sensing

Extreme low noise MEMS silicon sensor with close loop electronic.

MEMS capacitive sensor and open loop electronic with a large bandwidth from DC to few kHz.

Capacitive silicon sensor, ASIC and temperature sensor that offer a long- term stability in its performance.

Low g capacitive element with open loop electronic for high precision angle measurements.