Colibrys Switzerland Ltd today published a list of surplus equipments for sale. The equipments have been previously used in manufacture of Silicon based MEMS devices and are primarily suitable for 4 or 6 inch manufacture. These equipments also include a substantial inventory of spare parts.
The list includes a recently fully refurbished EVG 620 6 inch double sided mask aligner; two Electrotech MS6210 sputter deposition systems; Airco BJD1800 evaporator; KLA-Tencor Surfscan AIT 8010 and a Surfscan 5500 particle / pattern wafer inspection tools.
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For more details do not hesitate to contact Antoine.Ndondo@colibrys.com