Colibrys Switzerland Ltd today published a list of surplus equipments for sale. The equipments have been previously used in manufacture of Silicon based MEMS devices and are primarily suitable for 4 or 6 inch manufacture. These equipments also include a substantial inventory of spare parts.

 

The list includes a recently fully refurbished EVG 620 6 inch double sided mask aligner; two Electrotech MS6210 sputter deposition systems; Airco BJD1800 evaporator; KLA-Tencor Surfscan AIT 8010 and a Surfscan 5500 particle / pattern wafer inspection tools.

 

	Download "Equipment for sale"
	(PDF 56KB)

 

For more details do not hesitate to contact Antoine.Ndondo@colibrys.com