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In production - recommended for new design-in.

MS9000 MEMS Accelerometer

Colibrys MS9000 sensors are high-performance MEMS capacitive accelerometers developed for precision inertial systems for land, sea and air applications. With a dynamic range of ±2g to ±200g: they are part of the exclusive group of MEMS used in EASA, FAA and DAL A certified systems.

This single-axis analog accelerometer is based on bulk micro-machined silicon elements specifically designed for high bias stability over temperature in harsh environments. The product embeds a low-power ASIC (0.5 mA), a temperature sensor and is fully calibrated. The robust, hermetically-sealed LCC20 ceramic package insures long-term stability.

With nearly one million sensors shipped over the past 25 years, our technologies deliver field-proven, long-term reliability and performance for your most demanding applications. All Colibrys products are designed and manufactured in Switzerland and are individually tested and qualified to Colibrys standards.

Key features

  • Low bias and scale factor temperature coef < ± 0.5 mg/°C (typ) and 300 ppm/°C (typ) ( for ±10g range).
  • A reference for One Year Bias stability, <±1.5mg typ. (for ±10g range)
  • High resolution < 0.15 mg typ (for ±10g range)
  • High repeatability Bias after shock
PerformanceMS9002MS9005MS9010MS9030MS9050MS9100MS9200Units
Measurement range± 2± 5± 10± 30± 50± 100± 200g
One year bias stability @ 1000g 0.3 (< 1.5)0.75 (< 3.75)1.5 (< 7.5)4.5 (< 22.5)7.5 (< 37.5)15 (< 75)30 (< 150)mg typ. (max.)
Bias temp. coefficient < 0.1< 0.25< 0.5< 1.5< 2.5< 5< 10mg/°C typ.
Scale factor sensitivity (K1)1000 ± 8400 ± 4200 ± 266.6 ± 140 ± 120 ± 110 ± 1mV/g
One year scale factor stability & [2]300 (< 1000)300 (< 1000)300 (< 1000)300 (< 1000)300 (< 1000)300 (< 1000)300 (< 1000)ppm typ. (max.)
Scale factor temp. coefficient 100100100100100100100ppm / °C typ.
Resolution / Threshold (@ 1Hz)< 0.1< 0.25< 0.6< 1.7< 2.8< 5.5< 11mg max.
Non linearity< 0.8< 0.8< 0.9< 0.9< 0.9< 1< 1 [5]% of FS max.
Bandwidth 0 to ≥ 1000 to ≥ 1000 to ≥ 1000 to ≥ 1000 to ≥ 1000 to ≥ 1000 to ≥ 100Hz
Noise spectral density in band 1845902704509001800μg/√Hz typ.
Operating Temperature Range-55°C to 125 °C -55°C to 125 °C -55°C to 125 °C -55°C to 125 °C -55°C to 125 °C -55°C to 125 °C -55°C to 125 °C

Success Story

“The inertial sensors we selected from Colibrys [MS9000] were ideal for us because of its long term bias stability and high reliability to build a compact IMU without sacrificing the performance that OxTS are known for” – Mr. Iain Clarke, Product Manager at Oxford Technical Solutions Ltd. – Download the Press Release

 

 Aerospace

  • Automated flight control
  • Artificial horizon
  • AHRS (Attitude Heading Reference System)
  • IMUs
  • Fixed winds and helicopter flight control system
  • Platform stabilization
  • UAVs auto pilot
  • Flight tests
  • Flight instrument system

 

Defense

  • Missiles (short, medium,) guidance
  • Guided munitions
  • Land and marine navigation system
  • Health usage monitoring system (HUMS)
  • North findings / Gyrocompassing
  • Target stabilization
  • Armored vehicle positioning

Industrial / Railway / Energy

  • Linear acceleration for motion control on train
  • GPS/INS system
  • Robotic control
  • Height control of magneto-levitation train
  • Measurement While Drilling (MWD)
  • Directional drilling
  • Logging While Drilling (LWD)
  • Inertial measurement within pipeline
  • Guidance and navigation in absence of GPS for underwater ROV

 

 

NAME TYPE DETAILS
MS9000 Datasheet Datasheet Download Datasheet
Accelerometer for AHRS application Application Note Download
LCC mounting and soldering conditions Technical Note Download
Evaluation board - EVBA Technical Note Download
Success Story - xOEMcore by OxTS Press Release Download

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MS9000 Evaluation Board (EVBA)
is a device designed to evaluate a full performance of Colibrys MS9000 accelerometer series by a simple connection to a power supply and a voltmeter. EVBA design implies a possibility to be mounted to various evaluation environments – the shaker, the tumble table and the oven.

EVBA includes all the components for immediate functioning :
– Soldered MEMS accelerometer with 3 decoupling capacitors
– 2 Connectors (heading & mating).

Read full Technical Note EVBA MS9000/VS9000/TS9000