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TS9000 ±1 g Inclinometer

Colibrys TS9001 inclinometer is a high performance capacitive MEMS with a low g range developed for precision tilting systems in Energy, industrial, Military, train applications with a dynamic range of ±1 g (±90°).

This single- axis analog accelerometer/Inclinometer is based on bulk micro-machined silicon elements specifically designed for very high Bias stability over temperature in harsh environments. The product embeds a low power ASIC (0.5 mA) and a temperature sensor.
The robust ceramic packaging with LCC20 hermetic sealing offers competitive advantages for long-term bias stability requirements Vs industrial plastic package.

With nearly one million sensors shipped over the past 25 years, our technologies deliver field-proven, long-term reliability and performance for your most demanding applications. All Colibrys products are designed and manufactured in Switzerland and are individually tested and qualified to Colibrys standards.

Key features

  • A reference for long term bias stability <± 0.043°
  • Excellent resolution < ± 0.0025° @ 1Hz
  • Low temperature bias sensitivity coef Bias < ±0.006°/°C
  • Large Temperature of use up to -40 to 125 °C
Measurement range± 1g
Measurement Range for Angle (°) ±90°(°) ; The angle output has Sinusoidal relationship to voltage output g
Bias Calibration± 0.287°
One year bias stability @ 1000g < ± 0.043° typ.
Bias temp. coefficient < ± 0.006°/°C typ.
Scale factor sensitivity (K1)2000 ± 8mV/g
One year scale factor stability 300 ppm typ.
Scale factor temp. coefficient100ppm / °C typ.
Resolution / Threshold (@ 1Hz)< 0.0025° .
Non linearity< ±1% of FS max.
Bandwidth [4]0 to ≥ 100Hz
Noise spectral density in band 0.0005°/√Hz typ.
Operating temperature range-40°C to 125 °C


  • Vertical Borehole  drilling survey
  • Dams, Bridge, Construction Survey
  • Civil engineering tilt system
  • Geophysics controls – leveling
  • Borehole profile in place inclinometers


  • Leveling instruments
  • Antenna stabilization
  • Construction machine leveling
  • High performance crane tilt detection
  • Gravimeter
  • Tunneling system
  • Solar farm inclinometer



  • Antenna leveling
TS9000 Datasheet Datasheet Download Datasheet
LCC mounting and soldering conditions Technical Notes Download
Tilt / Inclination sensing Application Notes Download
Evaluation board - EVBA Technical Notes Download
Introduction to Inclinometers/Tilt sensors Powerpoint presentation Download

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  • This field is for validation purposes and should be left unchanged.

TS9001 Evaluation Board (EVBA) is a device designed to evaluate a full performance of Colibrys TS9001 accelerometer by a simple connection to a power supply and a voltmeter. EVBA design implies a possibility to be mounted to various evaluation environments – the shaker, the tumble table and the oven.

EVBA includes all the components for immediate functioning :
– Soldered MEMS accelerometer with 3 decoupling capacitors
– 2 Connectors (heading & mating)

Read full Technical Note EVBA TS9000/MS9000/VS9000.