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TS9000 Inclinometer

Colibrys TS9000 inclinometers are high performance capacitive MEMS with a low g range developed for precision tilting systems in air, land, train and naval applications with a dynamic range of ±1 g (±90°) and ±2g.

This single- axis analog accelerometer is based on bulk micro-machined silicon elements specifically designed for high Bias stability over temperature in harsh environments. The product embeds a low power ASIC (0.5 mA) and a temperature sensor.
The robust ceramic packaging with LCC20 hermetic sealing offers competitive advantages for long-term bias stability requirements.

With nearly one million sensors shipped over the past 25 years, our technologies deliver field-proven, long-term reliability and performance for your most demanding applications. All Colibrys products are designed and manufactured in Switzerland and are individually tested and qualified to Colibrys standards.

MS9001 and MS9002 have been renamed TS9000 in accordance to new Colibrys Inclinometer product family  branding.
TS as “Tilt Sensor”.

New name product will be available for Q3 2015 and during this transition period the legacy name MS9001 and MS 9002 are still available for order.

Key features

  • Excellent bias stability, up to 0.15mg
  • Robust hash environment, sealed package
  • Extra small LCC20 ceramic package
  • Temperature of use up to 125 °C
 TS9001TS9002Units
Measurement range± 1± 2g
One year bias stability @ 1000g 0.15 (< 0.75)0.3 (< 1.5)mg typ. (max.)
Switch on/off repeatability< 0.1< 0.15mg max.
Bias temp. coefficient < 0.05< 0.1mg/°C typ.
Scale factor sensitivity (K1)2000 ± 81000 ± 8mV/g
One year scale factor stability 300 (< 1000)300 (< 1000)ppm typ. (max.)
Scale factor temp. coefficient100100ppm / °C typ.
Resolution / Threshold (@ 1Hz)< 0.05< 0.1mg max.
Non linearity< 1< 0.8% of FS max.
Bandwidth [4]0 to ≥ 1000 to ≥ 100Hz
Noise spectral density in band 1818μV/√Hz typ.
Operating temperature range-55°C to 125 °C-55°C to 125 °C

Accelerometer specifications

 TS9001TS9002Units
Measurement range± 1± 2g
Bias calibration< 5< 10mg
One year bias stability @ 6000g [1]0.75 (< 2.5)1.5 (< 5)mg typ. (max.)
One year bias stability @ 1000g [2]0.15 (< 0.75)0.3 (< 1.5)mg typ. (max.)
Switch on/off repeatability< 0.1< 0.15mg max.
Bias temp. coefficient [3]< 0.05< 0.1mg/°C typ.
± 0.2± 0.4mg/°C max.
Scale factor sensitivity (K1)2000 ± 81000 ± 8mV/g
One year scale factor stability [1] & [2]300 (< 1000)300 (< 1000)ppm typ. (max.)
Scale factor temp. coefficient [3]100100ppm / °C typ.
-50 / 250-50 / 250min. / max.
Input axis misalignment (Kp, Ko)< 10< 10min. / max.
11% max.
Resolution / Threshold (@ 1Hz)< 0.05< 0.1mg max.
Non linearity< 1< 0.8% of FS max.
< 0.01< 0.02g max.
Bandwidth [4]0 to ≥ 1000 to ≥ 100Hz
Noise spectral density in band 1818μV/√Hz typ.
(0 ; 9kHz)2424max.
Resonant frequency1.41.4kHz

[1] One year stability defined according to IEEE 528-2001: turn on / on, storage at -55°C and 85°C, -40°C to 125°C T cycling, -55°C to 85°C unpowered harass, vibration, shock (6000g, single shock in one axis).

[2] One year stability defined according to IEEE 528-2001: turn on / on, storage at -55°C and 85°C, -40°C to 125°C T cycling, -55°C to 85°C unpowered harass, vibration, shock (1000g, single shock in one axis).

[3] Temperature coefficients are specified for a range of –40°C to 20°C, where temperature behavior is typically linear and coefficient are maximum.

[4] The bandwidth is defined as the frequency band for which the sensitivity has decreased by less than 3dB.

Environmental specifications

 TS9001 / TS9002
Operating temperature range-55°C to +125°C (-67°F to 255°F)
ReliabilityResults based on MIL-HDBK-217, notice 2, are available on request.
Shock resistanceUp to 6’000 g (0.15ms half-sine, single shock, not repetitive, in one direction o, p or i)
Recovery time< 1ms (1000g, half-sine period 1ms, shocks in direction i)
Vibration20 g rms, 20-2000 Hz (random noise, 30 minutes in each direction o, p, i)
ESD sensitivityClass 2 (requirements MIL-STD-883-G, 1 Method 3015.7), Human Body Model 2kV
Ultrasonic cleaningThe product can’t be cleaned with ultrasonic bath. Such a cleaning process will largely affect the sensor integrity

SMD Mounting

The TS9000 is RoHS compliant suitable for lead free soldering process and SMD mounting. It must be tightly fixed to the PCB, using the bottom of the housing as reference plane to ensure a good axis alignment. The stress induced by the soldering of the LCC package is a specific MEMS concern, especially when it comes to high-end capacitive sensors. In order to obtain good stress homogeneity and the best long term stability, all the leads of the accelerometer must be soldered to the pads of the PCB. See the Colibrys Application Note “LCC-48 housing, soldering conditions” available on our web site for more information about the LCC mounting process in general.

Physical specifications

 TS9001 / TS9002
PackagingNon magnetic, LCC, 20 pin housing
Lead finishingAu plating: 0.5 to 1.5 µm
Ni plating: 1.27 to 8.89 µm (typ. 3 to 5 µm)
W (tungsten): 10 to 15 µm
HermeticityThe product has been qualified according to MIL-STD-833-G. Hermetic sealing is systematically qualified at 5·10-8 atm·cm3/s
Weight< 1.5 grams
SizeTyp. 8.9 x 8.9 x 3.23 mm (0.35 x 0.35 x 0.127 inch)
Max. 9.2 x 9.2 x 3.5 mm (0.354 x 0.354 x 0.138 inch)
Proximity effectThe sensor is sensitive to external parasitic capacitance. Moving metallic objects with large mass or parasitic effect at proximity of the accelerometer (mm range) must be avoided to insure best product performances.
Reference plane for axis alignmentLCC must be tightly fixed to the PCB, using the bottom of the housing as reference plane for axis alignment.
Using the lid as reference plane or for assembly may affect specifications and product reliability (i.e. axis alignment and/or lid soldering integrity)

Principle of operation

The standard calibration voltage for the TS9000 is (VDD-VSS) = 5V. Therefore, all specifications are valid for this supply voltage unless otherwise stated. Upon market request, the calibration of the product at a different voltage (between 2.5V and 5.5V) is possible.
In such a case, the nominal output signal will vary according to the following equation:

Vout = (VDD – VSS) / 2 + Ai * (K1 * VDD / 5 ) (1)
VAGND = (VDD – VSS) / 2 (2)

According to this equation (1), the bias and scale factor are ratiometric to the power supply voltage.
A reference voltage VAGND is also provided at half of the power supply and corresponds to the output voltage at zero g. All sensors are calibrated to match the ideal response curve in term of offset, gain and non-linearity.

At every power-up, the microcontroller, used as memory, transfers the calibration parameters to the ASIC and then goes in a sleep mode. During this initialization phase, which takes less than 50ms, the current consumption goes up to max. 1,5mA @ 5V and at room temperature. Then, the normal operating current is set and remains less than 400μA under similar conditions.

The following model describes each sensor:

Vout = k1*(k0+Ai+k2Ai2+k3Ai3+kpAp+koAo+kipAiAp+kioAiAo+E)

where

  • Ai, Ap, Ao are the accelerations for each axes of the sensor with:
    I : input axis (z axis)
    p: pendulous axis (y axis)
    o: output axis, also named pivot or hinge axis (x axis)
  • K1 is accelerometer scale factor [V/g]
  • K0 is bias [g]
  • K2 is second order non linearity [g/g2]
  • K3 is third order non-linearity [g/g3]
  • Kp is pendulous cross axis non linearity [rad]
  • Ko is output cross axis non linearity [rad]
  • Kip, Kio are cross-coupling coefficients [rad/g]
  • E is the residual noise [g]

Electrical specifications

 TS9001 / TS9002
Input voltage (VDD – VSS)2.5 to 5.5 VDC. The standard voltage for calibration is 5.0 VDC.
Output voltage rangeFrom 0.5 to 4.5 VDC @ 5.0 VDC input voltage (VDD/2 at 0g)
Operating current consumption < 400 μA @ 5.0 VDC
Initialization & reset current consumptionTyp. 1500 μA @ 5.0 VDC during the initialization phase (less than 35 ms at room temperature)
Reset The sensor is Brown out protected. A reset occurs when the power supply jumps more than -0.46 V with a slope >380V/s or if the power supply drops below 2.2V. The recovery time is typ. 25 ms (max 35 ms)
Output impedance / load Min. 50 kΩ at Vout (pin 8) and VAGND (pin 5)
Max. 50 pF at Vout (pin 8) and Max. 100 μF at VAGND (pin 5)

Temperature sensor specifications

Output Voltage at 20°CTyp: 1.632 V
SensitivityTyp: -11.77 mV/°C
Long term stabilityMax -0.03°C to +0.09°C (1000h @ 150°C)
Accuracy± 5°C (From -40°C to 125°C)

Temperature compensation

The TS9000 delivers an output signal without any internal temperature compensation. The intrinsic temperature coefficient is quite small but can be further improved through a calibration, using the temperature provided by the internal temperature sensor. Third order compensation is generally required for a coherent modeling of a TS9000.

Sensor connections and power supply requirements

The detailed block diagram is given in the next figure
TS9000_schema_1

Components in the LCC20 packaging:

  • 1-axis silicon MEMS sensor
  • ASIC
  • Microcontroller
  • Temperature sensor
  • Pull down resistor

It is strongly recommended to use decoupling capacitors [C] of 1μF each between VDD and VAGND and between VAGND and VSS, placed as close as possible from the accelerometer. COG or X7R @ 5% capacitor types are recommended. On top, the VAGND track should be as short as possible. Any other setup will potentially affect the bias calibration and stability.

 

 

TS9000_top_view

 

PinTS9000 DescriptionNotes
4VDDPower supply
5VAGNDAccelerometer output reference voltage (VDD / 2)
6VSSGround
7VOTemperature sensor output
8VoutAccelerometer output signal
16VPP (Colibrys internal calibration pin)Must be connected to VSS
17SCK (Colibrys internal calibration pin)Must be connected to VSS
18SDA (Colibrys internal calibration pin)Must be connected to VSS

Drilling

Industrial/Railway inclinometer

Mil/Aerospace

  • North finding solution
  • Guidance and navigation in absence of GPS for underwater ROV
  • Antenna stabilization
  • Low G requirement for AHRS
NAME TYPE DETAILS
TS9000 Datasheet Datasheet Download
LCC mounting and soldering conditions Application Notes Download
Down borehole & directional drilling Application Notes Download
Tilt / Inclination sensing Application Notes Download
MS9000 / VS9000 Evaluation board - EVBA Technical Notes Download

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